A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Kovalgin, A. Y. (Invited speaker), Sourish Banerjee (Contributor), Ramazan Oguzhan Apaydin (Contributor)

    Activity: Talk or presentationInvited talk

    Period1 Oct 2018
    Event titleAiMES 2018: 2018 ECS and SMEQ Joint International Meeting
    Event typeConference
    LocationCancun, Mexico
    Degree of RecognitionInternational