A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Kovalgin, A. Y. (Invited speaker), Sourish Banerjee (Contributor), Ramazan Oguzhan Apaydin (Contributor)

Activity: Talk or presentationInvited talk

Period1 Oct 2018
Held atAiMES 2018
Event typeConference
LocationCancun, Mexico
Degree of RecognitionInternational