A differential resonator design using a bossed structure for applications in mechanical sensors

H.A.C. Tilmans (Speaker), S. Bouwstra (Speaker), D.J. IJntema (Speaker), Michael Curt Elwenspoek (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Karlsruhe, Germany
    Period1 Oct 1990
    Event title4th European Conference on Solid-State Transducers, Eurosensors 1990
    Event typeConference
    Conference number4
    LocationKarlsruhe, Germany

    Keywords

    • METIS-117903