A Study of Morphology and Texture of LPCVD Germanium-Silicon Films

Kovalgin, A. Y. (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Athens-Glyfada, Greece
    Period26 Aug 2001
    Event title13th European Conference on Chemical Vapour Deposition, EURO CVD 2001: null
    Event typeConference
    Conference number13
    LocationAthens-Glyfada, Greece

    Keywords

    • METIS-201710