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A Study of Morphology and Texture of LPCVD Germanium-Silicon Films
Kovalgin, A. Y.
(Speaker)
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: Athens-Glyfada, Greece
Period
26 Aug 2001
Event title
13th European Conference on Chemical Vapour Deposition, EURO CVD 2001
Event type
Conference
Conference number
13
Location
Athens-Glyfada, Greece
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Keywords
METIS-201710