A versatile trench isolation technology for the fabrication of microactuators

Edin Sarajlic (Speaker)

    Activity: Talk or presentationOral presentation

    Period16 Sep 2002
    Event title28th International Conference on Micro & Nano Engineering, MNE 2002
    Event typeConference
    Conference number28
    LocationLugano, Switzerland
    Degree of RecognitionInternational

    Keywords

    • METIS-206299