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Active Substrate Support Using Piezoelectric Thin Films

Activity: Talk or presentationOral presentation

Period4 Nov 2025
Event titleInternational Workshop on 11th Piezoelectric MEMS, PiezoMEMS 2025
Event typeWorkshop
Conference number11
SponsoraixACCT Systems GmbH
LocationHimeji, JapanShow on map
Degree of RecognitionInternational