Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

Mohammadreza Nematollahi (Speaker), Lucke, P. (Contributor), Bayraktar, M. (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Yakshin, A. (Contributor), Rijnders, A. J. H. M. (Contributor), Louis, E. (Contributor), Bijkerk, F. (Contributor)

Activity: Talk or presentationOral presentation

Period12 Dec 2018
Event title13th International MicroNanoConference 2018: Microsystems & Nanotechnology Conference
Event typeConference
Conference number13
LocationAmsterdam, Netherlands
Degree of RecognitionInternational

Keywords

  • Adaptive Optics
  • EUV lithography
  • Deformable multilayer mirror
  • PZT