Keywords
- Adaptive Optics
- EUV lithography
- Deformable multilayer mirror
- PZT
Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography
- Mohammadreza Nematollahi (Speaker)
- Philip Lucke (Contributor)
- Bayraktar, M. (Contributor)
- Kerstin Hild (Contributor)
- Toralf Gruner (Contributor)
- Yakshin, A. (Contributor)
- Rijnders, A. J. H. M. (Contributor)
- Louis, E. (Contributor)
- Bijkerk, F. (Contributor)
Activity: Talk or presentation › Oral presentation