Keywords
- METIS-314373
All Oxide Epitaxial piezo-MEMS Devices : Fabrication, Understanding and Improvement via Microstructural Engineering
- N. Banerjee (Speaker)
- Houwman, E. P. (Speaker)
- Koster, G. (Speaker)
- Rijnders, A. J. H. M. (Speaker)
Activity: Talk or presentation › Oral presentation