All Oxide Epitaxial piezo-MEMS Devices : Fabrication, Understanding and Improvement via Microstructural Engineering

N. Banerjee (Speaker), Houwman, E. P. (Speaker), Koster, G. (Speaker), Rijnders, A. J. H. M. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Singapore
Period25 May 2015

Keywords

  • METIS-314373