All-oxide PiezoMEMS, device fabrication and properties

Ruud Johannes Antonius Steenwelle (Speaker), Rijnders, A. J. H. M. (Speaker)

Activity: Talk or presentation › Invited talk

Description

Plaats van uitgifte: Itamambuca, Brazil
Period14 Nov 2013
Event titleEighth Multifuctional Materials Workshop
Event typeConference
LocationItamambuca, Brazil

Keywords

  • METIS-299087