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All-oxide PiezoMEMS Devices by Pulsed Laser Deposition
Jan M. Dekkers (Speaker), Ruud Johannes Antonius Steenwelle (Speaker), X. Wan (Speaker),
Houwman, E. P.
(Speaker),
Rijnders, A. J. H. M.
(Speaker)
Inorganic Materials Science
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: San Francisco, USA
Period
13 Apr 2012
Event title
MRS Spring Meeting & Exhibit 2012
Event type
Conference
Location
San Francisco, United States, California
Keywords
METIS-288611