All-oxide PiezoMEMS Devices by Pulsed Laser Deposition

Jan M. Dekkers (Speaker), Ruud Johannes Antonius Steenwelle (Speaker), X. Wan (Speaker), Houwman, E. P. (Speaker), Rijnders, A. J. H. M. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: San Francisco, USA
Period13 Apr 2012
Event titleMRS Spring Meeting & Exhibit 2012: null
Event typeConference
LocationSan Francisco, United States, California

Keywords

  • METIS-288611