All-oxide PiezoMEMS devices by Pulsed Laser Deposition (keynote)

Rijnders, A. J. H. M. (Speaker)

Activity: Talk or presentation › Invited talk

Description

Plaats van uitgifte: Noordwijkerhout
Period9 Dec 2013
Event titleM2I Conference 2013: Tertiary Oxidation and metal contamination of EUV optics
Event typeConference
LocationNoordwijkerhout, The Netherlands

Keywords

  • METIS-299086