All-oxide PiezoMEMS devices by Pulsed Laser Deposition (keynote)

Activity: Talk or presentationInvited talk

Description

Plaats van uitgifte: Noordwijkerhout
Period9 Dec 2013
Event titleM2I Conference 2013: Tertiary Oxidation and metal contamination of EUV optics
Event typeConference
LocationNoordwijkerhout, The Netherlands

Keywords

  • METIS-299086