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All-oxide PiezoMEMS devices by Pulsed Laser Deposition (keynote)
Rijnders, A. J. H. M.
(Speaker)
Inorganic Materials Science
Activity
:
Talk or presentation
›
Invited talk
Description
Plaats van uitgifte: Noordwijkerhout
Period
9 Dec 2013
Event title
M2I Conference 2013: Tertiary Oxidation and metal contamination of EUV optics
Event type
Conference
Location
Noordwijkerhout, The Netherlands
Keywords
METIS-299086