Anisotropic wet-chemical etching of silicon: pits, peaks, principles, pyramides and particles

A.J. Nijdam (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Albuquerque, USA
    Period5 Mar 2001
    Event titleInvited presentation at Sandia National Laboratories
    Event typeConference
    LocationAlbuquerque, USA

    Keywords

    • METIS-201169