Anodic etching of silicon for the fabrication of micromechanical devices

Gardeniers, J. G. E. (Invited speaker)

    Activity: Talk or presentationInvited talk

    Period11 Nov 1994
    Event title2nd European Workshop on Electrochemical Processing of Semiconductors, EWEPS 1994
    Event typeConference
    Conference number2
    LocationAmsterdam, Netherlands