Application of etching for silicon micromachining

Michael Curt Elwenspoek (Invited speaker)

    Activity: Talk or presentationOral presentation

    Description

    Opmerking: Invited Plaats van uitgifte: Amsterdam
    Period11 Nov 1994
    Event title2nd European Workshop on Electrochemical Processing of Semiconductors, EWEPS 1994: null
    Event typeConference
    Conference number2
    LocationAmsterdam, Netherlands

    Keywords

    • METIS-116540