Application of fluorcarbon polymers in micromechanics and micromachining

Henricus V. Jansen (Speaker), Gardeniers, J. G. E. (Speaker), J. Elders (Speaker), H.A.C. Tilmans (Speaker), Michael Curt Elwenspoek (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Budapest, Hongarije
    Period26 Sep 1993
    Event titleEurosensors VII
    Event typeConference
    LocationBudapest, Hungary

    Keywords

    • METIS-118015