Application of micromachining techniques for a silicon condenser microphone

P.R. Scheeper (Speaker), A.G.H. van der Donk (Speaker), Olthuis, W. (Speaker), Piet Bergveld (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Universiteit Twente, Enschede
    Period26 Jun 1992
    Event titleMesa-dag (Micro Electronics, Materials Engineering, Sensors & Actuatros): null
    Event typeConference
    LocationUniversiteit Twente, Enschede

    Keywords

    • METIS-118129