Aufrauhen während des homo-epitaktische Wachstums von Si(001)

L.C. Jorritsma (Speaker), P.E. Hegeman (Speaker), Zandvliet, H. J. W. (Speaker), Wormeester, H. (Speaker), A. van Silfhout (Speaker)

Activity: Talk or presentationOral presentation

Period21 Mar 1994
Event titleDPG Frühjahrstagung 1994 Münster: (DPG Spring Meeting)
Event typeConference
LocationMünster, Germany
Degree of RecognitionInternational

Keywords

  • METIS-133153