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Bottom Electrode and Piezoelectric Thin Film Optimization for Active Wafer Support

Activity: Talk or presentation › Oral presentation

Period21 Jan 2025
Event titleNWO Physics 2025: Beyond Boundaries
Event typeConference
OrganiserNWO Dutch Research Council
LocationVeldhoven, NetherlandsShow on map
Degree of RecognitionNational

Keywords

  • Piezoelectric
  • wafer table