Broadband spectroscopy of EUV light sources using a transmission grating spectrometer

Bayraktar, M. (Speaker), Francesco Torretti (Contributor), Ruben Schupp (Contributor), Oscar Versolato (Contributor), Fei Liu (Contributor), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Bastiaens, H. M. J. (Contributor), Bijkerk, F. (Contributor)

Activity: Talk or presentationOral presentation

Period6 Nov 20178 Nov 2017
Event titleEUV Source Workshop 2017: null
Event typeWorkshop
LocationDublin, Ireland
Degree of RecognitionInternational