Broadband spectroscopy of EUV light sources using a transmission grating spectrometer

Bayraktar, M. (Speaker), Francesco Torretti (Contributor), Ruben Schupp (Contributor), Oscar Versolato (Contributor), Fei Liu (Contributor), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Bastiaens, H. M. J. (Contributor), Bijkerk, F. (Contributor)