Broadband spectroscopy of EUV light sources using a transmission grating spectrometer

  • Bayraktar, M. (Speaker)
  • Francesco Torretti (Contributor)
  • Ruben Schupp (Contributor)
  • Oscar Versolato (Contributor)
  • Fei Liu (Contributor)
  • Caspar Bruineman (Contributor)
  • Boris Vratzov (Contributor)
  • Bastiaens, H. M. J. (Contributor)
  • Bijkerk, F. (Contributor)

Activity: Talk or presentationOral presentation

Period6 Nov 20178 Nov 2017
Event titleEUV Source Workshop 2017
Event typeWorkshop
LocationDublin, IrelandShow on map
Degree of RecognitionInternational