Characterization of stress and texture in RTCVD poly-Si layers by X-ray diffraction

  • I. Barsony (Speaker)
  • J.G.E. Klappe (Speaker)
  • T.W. Ryan (Speaker)

    Activity: Talk or presentation › Oral presentation

    Period2 Dec 1991
    Event titleMRS Fall Meeting 1991
    Event typeConference
    LocationBoston, United States, MassachusettsShow on map