Characterization of stress and texture in RTCVD poly-Si layers by X-ray diffraction

I. Barsony (Speaker), J.G.E. Klappe (Speaker), T.W. Ryan (Speaker)

    Activity: Talk or presentationOral presentation

    Period2 Dec 1991
    Event titleMRS Fall Meeting 1991
    Event typeConference
    LocationBoston, United States, Massachusetts