Characterization of Tin Plasma Driven by High Energy, 2-μm-wavelength Light

  • Lars Behnke (Speaker)
  • Ruben Schupp (Contributor)
  • Adam Lassise (Contributor)
  • Zoi Bouza (Contributor)
  • John Sheil (Contributor)
  • Bayraktar, M. (Contributor)
  • Ronnie Hoekstra (Contributor)
  • Wim Ubachs (Contributor)
  • Oscar Versolato (Contributor)

Activity: Talk or presentationOral presentation

Period5 Nov 2020
Event titleEUV Source Workshop 2020
Event typeWorkshop
OrganisersEUV Litho, Inc., ETH Zurich
Degree of RecognitionInternational