Collector mirror design to separate the stray 10.6 μm CO2 laser light from the EUV light at the intermediate focus,

Bayraktar, M. (Speaker), van Goor, F. A. (Speaker), Boller, K. J. (Speaker), Bijkerk, F. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Toyama, Japan
Period6 Oct 2013
Held at2013 International Symposium on Extreme Ultraviolet Lithography
Event typeConference
LocationToyama, Japan

Keywords

  • METIS-298547