Combined electrical and morphological characterization of Al2O3 films by non-contact AFM

Sturm, J. M. (Speaker), A. Zinine (Speaker), Wormeester, H. (Speaker), R.G. Bankras (Speaker), J. Holleman (Speaker), Schmitz, J. (Speaker), Poelsema, B. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Boston, USA
Period30 Oct 2005
Event title52nd AVS International Symposium & Exhibition 2005
Event typeConference
Conference number52
LocationBoston, United States, Massachusetts

Keywords

  • METIS-227175