Combined electrical and morphological characterization of Al2O3 films by non-contact AFM

Activity: Talk or presentation › Oral presentation

Description

Plaats van uitgifte: Boston, USA
Period30 Oct 2005
Event title52nd AVS International Symposium & Exhibition 2005
Event typeConference
Conference number52
LocationBoston, United States, MassachusettsShow on map

Keywords

  • METIS-227175