Control of the Crystallographic Orientation of PZT Thin Films on Silicon Substrates by a Single Process Step

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Boston, USA
Period2 Dec 2009
Event titleMRS Fall Meeting 2009
Event typeConference
OrganiserMaterials Research Society (MRS)
LocationBoston, United States, Massachusetts

Keywords

  • METIS-260948