Control of the Crystallographic Orientation of PZT Thin Films on Silicon Substrates by a Single Process Step

Nguyen, D. M. (Speaker), Ruud Johannes Antonius Steenwelle (Speaker), Jan M. Dekkers (Speaker), David H.A. Blank (Speaker), Rijnders, A. J. H. M. (Speaker)

Activity: Talk or presentationOral presentation


Plaats van uitgifte: Boston, USA
Period2 Dec 2009
Event titleMRS Fall Meeting 2009
Event typeConference
LocationBoston, United States, Massachusetts


  • METIS-260948