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Control of the Crystallographic Orientation of PZT Thin Films on Silicon Substrates by a Single Process Step
Nguyen, D. M.
(Speaker)
Ruud Johannes Antonius Steenwelle (Speaker)
Jan M. Dekkers (Speaker)
David H.A. Blank (Speaker)
Rijnders, A. J. H. M.
(Speaker)
Inorganic Materials Science
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: Boston, USA
Period
2 Dec 2009
Event title
MRS Fall Meeting 2009
Event type
Conference
Organiser
Materials Research Society (MRS)
Location
Boston, United States, Massachusetts
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Keywords
METIS-260948
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