Copper Chemical Mechanical Polishing

V. Nguyen Hoang (Invited speaker), H. van Kranenburg (Invited speaker), P.H. Woerlee (Invited speaker)

    Activity: Talk or presentationOral presentation

    Description

    Opmerking: Invited Plaats van uitgifte: Delft, the Netherlands
    Period25 Oct 1999
    Event titlePresentation to DIMES technicians
    Event typeConference
    LocationDelft, the Netherlands

    Keywords

    • METIS-116279