Copper chemical mechanical polishing using slurry-free technique

  • V. Nguyen Hoang (Keynote speaker)
  • A.J. Hof (Keynote speaker)
  • H. van Kranenburg (Keynote speaker)
  • P.H. Woerlee (Keynote speaker)
  • F. Weimar (Keynote speaker)

    Activity: Talk or presentation › Invited talk

    Period29 Feb 2000
    Event titleMaterials for Advanced Metallization, MAM 2000
    Event typeConference
    LocationStresa, ItalyShow on map