Copper chemical mechanical polishing using slurry-free technique

V. Nguyen Hoang (Keynote speaker), A.J. Hof (Keynote speaker), H. van Kranenburg (Keynote speaker), P.H. Woerlee (Keynote speaker), F. Weimar (Keynote speaker)

    Activity: Talk or presentationInvited talk

    Period29 Feb 2000
    Event titleMaterials for Advanced Metallization, MAM 2000
    Event typeConference
    LocationStresa, Italy