Deep dry etching

Henricus V. Jansen (Keynote speaker)

    Activity: Talk or presentationOral presentation

    Description

    Opmerking: Key-note speaker Plaats van uitgifte: Gelsenkirchen, Germany
    Period18 Jun 1998
    Event titleVoordracht, 2nd Symposium on Microsystems in Practice
    Event typeConference
    LocationGelsenkirchen, Germany

    Keywords

    • METIS-116409