Depositon of dielectric thin films by means of ECR PECVD

I.G. Isai (Keynote speaker)

    Activity: Talk or presentationOral presentation

    Description

    Opmerking: Key-note speaker Plaats van uitgifte: Delft, The Netherlands
    Period25 Oct 1999
    Event titleFIST'99
    Event typeConference
    LocationDelft, The Netherlands

    Keywords

    • METIS-116277