Desing considerations for micro mechanical sensors using encapsulated built in resonant strain gauges

H.A.C. Tilmans (Speaker), S.L. Spence (Speaker), S. Bouwstra (Speaker), J.H.J. Fluitman (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Karlsruhe, Germany
    Period1 Oct 1990
    Event title4th European Conference on Solid-State Transducers, Eurosensors 1990
    Event typeConference
    Conference number4
    LocationKarlsruhe, Germany

    Keywords

    • METIS-117904