Dynamics of the oxygen adsorption on clean Si surfaces: An experimental and theoretical AES approach

Wormeester, H. (Speaker), H.J. Borg (Speaker), Keim, E. G. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Toronto (Canada)
Period8 Oct 1990
Event title37th National Symposium of the American Vacuum Society
Event typeConference
LocationToronto (Canada)

Keywords

  • METIS-132944