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Electrical characterisation of B+ and BF2+ implanted poly-Si and Poly-Ge1Si1-x as gate material for sub-0.25um
Salm, C.
(Invited speaker), D.T. van Veen (Invited speaker), J. Holleman (Invited speaker), P.H. Woerlee (Invited speaker)
Activity
:
Talk or presentation
›
Oral presentation
Description
Opmerking: Invited
Period
25 Sep 1995
Event title
25th European Solid State Device Research Conference, ESSDERC 1995
Event type
Conference
Conference number
25
Location
The Hague, Netherlands
Degree of Recognition
International
Keywords
METIS-116846