Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K. (Speaker), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Kovalgin, A. Y. (Contributor)

Activity: Talk or presentationOral presentation

Period19 Mar 2019
Held at32nd IEEE International Conference on Microelectronic Test Structures, ICMTS 2019
Event typeConference
Conference number32
LocationKitakyushu City, Japan
Degree of RecognitionInternational