Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K. (Speaker), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Kovalgin, A. Y. (Contributor)

    Activity: Talk or presentationOral presentation

    Period19 Mar 2019
    Event title32nd IEEE International Conference on Microelectronic Test Structures, ICMTS 2019
    Event typeConference
    Conference number32
    LocationKitakyushu City, Japan
    Degree of RecognitionInternational