Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

    Activity: Talk or presentationOral presentation

    Period19 Mar 2019
    Event title32nd IEEE International Conference on Microelectronic Test Structures, ICMTS 2019
    Event typeConference
    Conference number32
    LocationKitakyushu City, JapanShow on map
    Degree of RecognitionInternational