Electrical cross-talk in two-port resonators - the silicon resonant beam force sensor

C.J. van Mullem (Speaker), H.A.C. Tilmans (Speaker), A.J. Mouthaan (Speaker), J.H.J. Fluitman (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Rome
    Period30 Sep 1991
    Event title5th European Conference on Solid-State Transducers, Eurosensors V 1991
    Event typeConference
    Conference number5
    LocationRome, Italy

    Keywords

    • METIS-117920