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Electrical Properties of Room Temperature SiO 2 Deposited by a Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma
I.G. Isai (Speaker)
Kovalgin, A. Y.
(Speaker)
J. Holleman (Speaker)
P.H. Woerlee (Speaker)
Hans Wallinga (Speaker)
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: Salt Lake City, USA
Period
2002
Event title
202nd Meeting of the Electrochemical Society
Event type
Conference
Location
Salt Lake City, USA
Keywords
METIS-207808