Electrical Properties of Room Temperature SiO 2 Deposited by a Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma

I.G. Isai (Speaker), Kovalgin, A. Y. (Speaker), J. Holleman (Speaker), P.H. Woerlee (Speaker), Hans Wallinga (Speaker)

    Activity: Talk or presentationOral presentation


    Plaats van uitgifte: Salt Lake City, USA
    Event title202nd Meeting of the Electrochemical Society: null
    Event typeConference
    LocationSalt Lake City, USA


    • METIS-207808