Electrical Properties of Room Temperature SiO 2 Deposited by a Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma

I.G. Isai (Speaker), Kovalgin, A. Y. (Speaker), J. Holleman (Speaker), P.H. Woerlee (Speaker), Hans Wallinga (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Salt Lake City, USA
    Period2002
    Event title202nd Meeting of the Electrochemical Society: null
    Event typeConference
    LocationSalt Lake City, USA

    Keywords

    • METIS-207808