Electrical Properties of Room Temperature SiO 2 Deposited by a Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma

  • I.G. Isai (Speaker)
  • Kovalgin, A. Y. (Speaker)
  • J. Holleman (Speaker)
  • P.H. Woerlee (Speaker)
  • Hans Wallinga (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Salt Lake City, USA
    Period2002
    Event title202nd Meeting of the Electrochemical Society
    Event typeConference
    LocationSalt Lake City, USA

    Keywords

    • METIS-207808