Electrical properties of ultra-thin aluminum oxide layers on silicon

Sturm, J. M. (Speaker), A. Zinine (Speaker), Wormeester, H. (Speaker), Poelsema, B. (Speaker), R.G. Bankras (Speaker), J. Holleman (Speaker), Schmitz, J. (Speaker)

Activity: Talk or presentationOral presentation

Description

Titelbijdrage: Electrical properties of ultr-thin aluminum oxide layers on silicon Plaats van uitgifte: Nice, France
Period29 May 2006
Event titleE-MRS Spring Meeting 2006: Electrical properties of ultr-thin aluminum oxide layers on silicon
Event typeConference
LocationNice, France

Keywords

  • METIS-236001