Electrical properties of ultra-thin aluminum oxide layers on silicon

Activity: Talk or presentationOral presentation

Description

Titelbijdrage: Electrical properties of ultr-thin aluminum oxide layers on silicon Plaats van uitgifte: Nice, France
Period29 May 2006
Event titleE-MRS Spring Meeting 2006: Electrical properties of ultr-thin aluminum oxide layers on silicon
Event typeConference
LocationNice, FranceShow on map

Keywords

  • METIS-236001