Electrostatic curved electrode actuators

R. Legtenberg (Speaker), Berenschot, J. W. (Speaker), Michael Curt Elwenspoek (Speaker), J.H.J. Fluitman (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Amsterdam
    Period29 Jan 1995
    Event titleIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
    Event typeWorkshop
    LocationAmsterdam, Netherlands

    Keywords

    • METIS-134829