Etching of W/Si multilayer mirrors for the fabrication of Lamellar Multilayer Gratings

R. van der Meer (Speaker), B. Krishnan (Speaker), I.V. Kozhevnikov (Speaker), Meint J. de Boer (Speaker), B. Vratzov (Speaker), Bastiaens, H. M. J. (Speaker), Huskens, J. (Speaker), van der Wiel, W. G. (Speaker), P.E. Hegeman (Speaker), G.C.S. Brons (Speaker), Boller, K. J. (Speaker), Bijkerk, F. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Toulouse, France
Period17 Sep 2012
Held at38th International Conference on Micro & Nano Engineering, MNE 2012
Event typeConference
Conference number38
LocationToulouse, France

Keywords

  • METIS-287516