Etching of W/Si multilayer mirrors for the fabrication of Lamellar Multilayer Gratings

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Toulouse, France
Period17 Sep 2012
Event title38th International Conference on Micro & Nano Engineering, MNE 2012
Event typeConference
Conference number38
LocationToulouse, France

Keywords

  • METIS-287516