Etching technology

  • Michael Curt Elwenspoek (Speaker)

    Activity: Talk or presentation › Oral presentation

    Period5 Oct 1993
    Held atHahn-Schickard-Gesellschaft für angewandte Forschung e.V., Institut für Mikro- und Informationstechnik (HSG-IMIT), Germany
    Degree of RecognitionInternational

    Keywords

    • METIS-118200