Etching technology

Michael Curt Elwenspoek (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Enschede
    Period13 Dec 1993
    Event titleEC-COMETT course silicon based micromechanical sensors, actuators and systems
    Event typeConference
    LocationEnschede

    Keywords

    • METIS-118010