Experimental Study of LPCVD WxSi (N) as Copper Diffusion Barriers

Svetlana Nikolajevna van Nieuwkasteele-Bystrova (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Philips, Eindhoven, The Netherlands
    Period3 Jul 2001

    Keywords

    • METIS-202059