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Fabrication method for nearly-perfect circular channel structures using Buried Channel Technology and HNA etchant

  • Qihui Yu (Speaker)

Activity: Talk or presentation › Oral presentation

Description

MNE 2021 Conference oral presentation
Period21 Sept 2021
Event title47th Micro and Nano Engineering Conference, MNE 2021
Event typeConference
Conference number47
LocationTorino, ItalyShow on map
Degree of RecognitionInternational

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