Fabrication of functional structures on thin silicon nitride membranes

    Activity: Talk or presentation › Oral presentation

    Period16 Sept 2002
    Event title28th International Conference on Micro & Nano Engineering, MNE 2002
    Event typeConference
    Conference number28
    LocationLugano, SwitzerlandShow on map
    Degree of RecognitionInternational

    Keywords

    • METIS-206819