Fabrication of functional structures on thin silicon nitride membranes

P. Ekkels (Speaker), R.W. Tjerkstra (Speaker), Krijnen, G. J. M. (Speaker), Berenschot, J. W. (Speaker), J.P. Brugger (Speaker), Michael Curt Elwenspoek (Speaker)

    Activity: Talk or presentationOral presentation

    Period16 Sep 2002
    Event title28th International Conference on Micro & Nano Engineering, MNE 2002
    Event typeConference
    Conference number28
    LocationLugano, Switzerland
    Degree of RecognitionInternational

    Keywords

    • METIS-206819