FIB meets KOH: local etch-stop for Nanomechanical structures

J.P. Brugger (Invited speaker)

    Activity: Talk or presentationOral presentation

    Description

    Opmerking: Invited Plaats van uitgifte: UT, Enschede, The Netherlands
    Period24 May 2000
    Event titleinvited voordracht MESA+workshop on Focussed Ion-Beam: null
    Event typeConference
    LocationUT, Enschede, The Netherlands

    Keywords

    • METIS-116323