Focused ion beam nano-structuring of Al203 dielectric layers for photonic applications

F. Ay (Speaker), J. Bradley (Speaker), W.C.L. Hopman (Speaker), V.J. Gadgil (Speaker), R.M. de Ridder (Speaker), Kerstin Worhoff (Speaker), Markus Pollnau (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Copenhagen, Denmark
    Period23 Sep 2007
    Event title33rd International Conference on Micro- and Nano-Engineering, MNE 2007
    Event typeConference
    Conference number33
    LocationCopenhagen, Denmark

    Keywords

    • METIS-245357