Focused ion beam nano-structuring of Al203 dielectric layers for photonic applications
F. Ay (Speaker), J. Bradley (Speaker), W.C.L. Hopman (Speaker), V.J. Gadgil (Speaker), R.M. de Ridder (Speaker), Kerstin Worhoff (Speaker), Markus Pollnau (Speaker)
Activity: Talk or presentation › Oral presentation
Description
Plaats van uitgifte: Copenhagen, Denmark
Period
23 Sep 2007
Event title
33rd International Conference on Micro- and Nano-Engineering, MNE 2007