Activity: Talk or presentation › Oral presentation
Description
The recent developments of linear detectors with high energy sensitivity enabled the laboratory implementation of GEXRF measurements. In the presentation, we will compare laboratory GIXRF measurements with laboratory GEXRF measurements performed on a Malvern Panalytical Empyrean diffractometer, equipped with a 1Der detector. As a test sample nano-scaled Ru/V/B4C/Ru/Si waveguide structure was used. The similarities and differences of both schemes for the reconstruction of layers of atomic profiles will be discussed.