Growth and properties of functional oxide thin films for PiezoMEMS

Nguyen, D. M. (Speaker), Ruud Johannes Antonius Steenwelle (Speaker), P.M. te Riele (Speaker), Jan M. Dekkers (Speaker), David H.A. Blank (Speaker), Rijnders, A. J. H. M. (Speaker)

Inorganic Materials Science

Activity: Talk or presentation › Oral presentation

Description

Plaats van uitgifte: Dresden, Germany

Period	9 Sep 2008
Event title	22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008
Event type	Conference
Conference number	22
Location	Dresden, Germany

Keywords

METIS-252407