Skip to main navigation
Skip to search
Skip to main content
Home
Profiles
Research Units
Research Output
Datasets
Activities
Prizes
Press / Media
Search by expertise, name or affiliation
Growth and properties of functional oxide thin films for PiezoMEMS
Nguyen, D. M.
(Speaker), Ruud Johannes Antonius Steenwelle (Speaker), P.M. te Riele (Speaker), Jan M. Dekkers (Speaker), David H.A. Blank (Speaker),
Rijnders, A. J. H. M.
(Speaker)
Inorganic Materials Science
Activity
:
Talk or presentation
›
Oral presentation
Description
Plaats van uitgifte: Dresden, Germany
Period
9 Sep 2008
Event title
22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008
Event type
Conference
Conference number
22
Location
Dresden, Germany
Keywords
METIS-252407