Growth and properties of functional oxide thin films for PiezoMEMS

Nguyen, D. M. (Speaker), Ruud Johannes Antonius Steenwelle (Speaker), P.M. te Riele (Speaker), Jan M. Dekkers (Speaker), David H.A. Blank (Speaker), Rijnders, A. J. H. M. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Dresden, Germany
Period9 Sep 2008
Event title22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008
Event typeConference
Conference number22
LocationDresden, Germany

Keywords

  • METIS-252407