Growth and properties of functional oxide thin films for PiezoMEMS

  • Nguyen, D. M. (Speaker)
  • Ruud Johannes Antonius Steenwelle (Speaker)
  • P.M. te Riele (Speaker)
  • Jan M. Dekkers (Speaker)
  • David H.A. Blank (Speaker)
  • Rijnders, A. J. H. M. (Speaker)

Activity: Talk or presentationOral presentation

Description

Plaats van uitgifte: Dresden, Germany
Period9 Sep 2008
Event title22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008
Event typeConference
Conference number22
LocationDresden, Germany

Keywords

  • METIS-252407