He-ion microscopy for device analysis

R. van Gastel (Invited speaker)

Activity: Talk or presentationOral presentation

Period5 Oct 2012
Event title23rd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 2012
Event typeConference
Conference number23
LocationCagliari, Italy
Degree of RecognitionInternational

Keywords

  • METIS-288625