HOT WIRE ASSISTED ATOMIC LAYER DEPOSITION OF TWO- AND SINGLE-ELEMENT FILMS

Kovalgin, A. Y. (Invited speaker)

    Activity: Talk or presentationInvited talk

    Description

    Presented at The 4th Korea-EU workshop on Advanced Materials Processing, ICAE 2017, November 24, 2017
    Period24 Nov 2017
    Event title4th International Conference on Advanced Electromaterials, ICAE 2017
    Event typeConference
    Conference number4
    LocationJeju, Korea, Democratic People's Republic of
    Degree of RecognitionInternational