HOT WIRE ASSISTED ATOMIC LAYER DEPOSITION OF TWO- AND SINGLE-ELEMENT FILMS

Kovalgin, A. Y. (Invited speaker)

    Activity: Talk or presentationInvited talk

    Description

    Presented at The 4th Korea-EU workshop on Advanced Materials Processing, ICAE 2017, November 24, 2017
    Period24 Nov 2017
    Event title4th International Conference on Advanced Electromaterials, ICAE 2017: null
    Event typeConference
    Conference number4
    LocationJeju, Korea, Democratic People's Republic of
    Degree of RecognitionInternational