Hotwire-assisted Atomic Layer Deposition: principles and examples

Kovalgin, A. Y. (Invited speaker)

    Activity: Talk or presentationInvited talk

    Period3 Sep 2018 - 6 Sep 2018
    Event titleThe 10th International Conference on Hot Wire (Cat) and Initiated Chemical Vapor Deposition 2018
    Event typeConference
    Conference number10
    LocationKitakyushu, Japan
    Degree of RecognitionInternational