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Hotwire-assisted Atomic Layer Deposition: principles and examples
Kovalgin, A. Y.
(Invited speaker)
Activity
:
Talk or presentation
›
Invited talk
Period
3 Sept 2018
→
6 Sept 2018
Event title
The 10th International Conference on Hot Wire (Cat) and Initiated Chemical Vapor Deposition 2018
Event type
Conference
Conference number
10
Location
Kitakyushu, Japan
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Degree of Recognition
International
Documents & Links
http://www.cat-cvd.jp/
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