Hotwire-assisted Atomic Layer Deposition: principles and examples

Kovalgin, A. Y. (Invited speaker)

    Activity: Talk or presentationInvited talk

    Period3 Sep 20186 Sep 2018
    Event titleThe 10th International Conference on Hot Wire (Cat) and Initiated Chemical Vapor Deposition 2018
    Event typeConference
    Conference number10
    LocationKitakyushu, Japan
    Degree of RecognitionInternational