Hotwire-assisted Atomic Layer Deposition: principles and examples

Kovalgin, A. Y. (Invited speaker)

Activity: Talk or presentationInvited talk

Period3 Sep 2018 - 6 Sep 2018
Held atThe 10th International Conference on Hot Wire (Cat) and Initiated Chemical Vapor Deposition 2018
Event typeConference
Conference number10
LocationKitakyushu, Japan
Degree of RecognitionInternational