Improvement of the performance of microphones with a silicon nitride diaphragm and backplate

P.R. Scheeper (Speaker), Olthuis, W. (Speaker), Piet Bergveld (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Saint Louis, France
    Period18 Feb 1993
    Event titleMeeting "Micromechanical Acoustic Sensors"
    Event typeConference
    LocationSaint Louis, France

    Keywords

    • METIS-118098