In-situ process integration of polysilicon emitter stacks by Rapid Thermal Multi-Processing

I. Barsony (Speaker), R. Remmers (Speaker), J.G.E. Klappe (Speaker)

    Activity: Talk or presentationOral presentation

    Description

    Plaats van uitgifte: Strasbourg, France
    Period2 Jun 1992
    Event titleE-MRS Spring Meeting 1992: Synthetic Materials for Nonlinear Optics and Electronics
    Event typeConference
    LocationStrasbourg, France

    Keywords

    • METIS-117161